| AVS 63rd International Symposium & Exhibition | |
| Plasma Science and Technology | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | PS-TuM1 Invited Paper Translational and Vibrational Energy in Cl2 and O2 Plasmas Probed by Innovative Optical Diagnostics Jean-Paul Booth, D. Marinov, M. Foucher, O.Y.N. Guaitella, LPP-CNRS, Ecole Polytechnique, France, C. Drag, Laboratoire Aime Cotton, CNRS-U. Paris-Sud, France, A. Agarwal, S. Rauf, Applied Materials Inc. |
| 8:40am | PS-TuM3 Spectroscopic Measurement of Molecular Densities and Temperatures in Processing Plasmas Yaser Helal, C.F. Neese, F.C. De Lucia, The Ohio State University, A. Agarwal, B. Craver, P.R. Ewing, P.J. Stout, M.D. Armacost, Applied Materials, Inc. |
| 9:20am | PS-TuM5 Pulsed Capacitively Coupled Plasma Ignition: PROES and RF-IV Diagnostics John Poulose, M.J. Goeckner, L.J. Overzet, The University of Texas at Dallas |
| 9:40am | PS-TuM6 Control of Ion Energy Distributions on Insulating Surfaces using Pulsed Plasmas Tyler List, T. Mu, V.M. Donnelly, D.J. Economou, University of Houston |
| 11:00am | PS-TuM10 Invited Paper Charged Particle Dynamics in Technological Radio Frequency Plasmas Operated in CF4 Julian Schulze, West Virginia University, B. Berger, Ruhr-University Bochum, Germany, S. Brandt, West Virginia University, B. Bruneau, Ecole Polytechnique, Palaiseau, France, Y. Liu, Dalian University of Technology, I. Korolov, A. Derzsi, Hungarian Academy of Sciences, E. Schuengel, M. Koepke, West Virginia University, T. Mussenbrock, Ruhr-University Bochum, Germany, E.V. Johnson, T. Lafleur, J.-P. Booth, Ecole Polytechnique, Palaiseau, France, D. O'Connell, T. Gans, University of York, UK, YN. Wang, Dalian University of Technology, Z. Donko, Hungarian Academy of Sciences |
| 11:40am | PS-TuM12 Correlation of III/V Semiconductor Etch Results with Physical Parameters of High Density Reactive Plasmas Excited by Electron Cyclotron Resonance Gerhard Franz, Munich University of Applied Sciences, Germany, R. Meyer, M.-C. Amann, Technische Universität München, Germany |
| 12:00pm | PS-TuM13 Mapping Plasma Potential of Rotating Ionization Zone in DC Magnetron Sputtering Matjaz Panjan, Lawrence Berkeley National Laboratory, Slovenia, A. Anders, Lawrence Berkeley National Laboratory |