| AVS 63rd International Symposium & Exhibition | |
| Plasma Science and Technology | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | PS-WeM1 Multifrequency Impedance Matching Solutions for Plasma Excitation by Tailored Voltage Waveforms Erik V. Johnson, Ecole Polytechnique, Palaiseau, France, S. Dine, SOLAYL SAS, France, J.-P. Booth, Ecole Polytechnique, Palaiseau, France |
| 8:20am | PS-WeM2 Effect of Tailored Voltage Waveforms on Surface Nanotexturing of Silicon in Capacitively Coupled SF6/O2 Discharges Guillaume Fischer, Institut Photovoltaïque d'Ile-de-France (IPVF), France, E. Drahi, G. Poulain, Total MS-Energies Nouvelles, France, B. Bruneau, E.V. Johnson, LPICM, Ecole Polytechnique, France |
| 8:40am | PS-WeM3 Invited Paper Plasma Enhanced CVD processes: Dual Frequency PECVD with pulsing of liquid precursors and PEALD for Selective Deposition Christophe Vallee, LTM, Univ. Grenoble Alpes, CEA-LETI, France, R. Gassilloud, CEA, LETI, MINATEC Campus, R. vallat, LTM, Univ. Grenoble Alpes, CEA-LETI, F. Piallat, Altatech, France, M. Aoukar, LTM, Univ. Grenoble Alpes, CEA-LETI, P. Kowalczyk, LTM - CEA/LETI, France, P.D. Szkutnik, LTM, Univ. Grenoble Alpes, CEA-LETI, P. Noé, CEA, LETI, MINATEC Campus, A. Bsiesy, P. Gonon, LTM, Univ. Grenoble Alpes, CEA-LETI |
| 9:20am | PS-WeM5 Customizing Ion Energy Distributions in Pulsed Plasmas with Chirped Bias Power Steven Lanham, M.J. Kushner, University of Michigan |
| 9:40am | PS-WeM6 Nonlinear Frequency Pull in Pulsed Capacitively Coupled Plasmas J. Poulose, Lawrence Overzet, M.J. Goeckner, The University of Texas at Dallas, S. Shannon, North Carolina State University, D. Coumou, MKS Instruments |
| 11:00am | PS-WeM10 Invited Paper Plasma Source Development for Fusion Relevant Material Testing John Caughman, R.H. Goulding, T.M. Biewer, T.S. Bigelow, I.H. Campbell, S.J. Diem, A. Fadnek, D.T. Fehling, D.L. Green, C.H. Lau, E.H. Martin, P.V. Pesavento, J. Rapp, Oak Ridge National Laboratory, H.B. Ray, G.C. Shaw, M.A. Showers, University of Tennessee, P. Piotrowicz, D.N. Ruzic, University of Illinois at Urbana-Champaign, G.-N. Luo, Chinese Academy of Sciences |
| 11:40am | PS-WeM12 Linear Magnetron Magnet Pack for High Power Pulsed Magnetron Sputtering Jake McLain, P. Raman, I.A. Shchelkanov, University of Illinois at Urbana Champaign, J. Hrebik, Kurt J. Lesker Company, B. Jurczyk, R. Stubbers, Starfire Industries, D.N. Ruzic, University of Illinois at Urbana-Champaign |