AVS 52nd International Symposium
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Monday 8:20am | PS-MoM | Plasma Diagnostics |
| Monday 2:00pm | PS1-MoA | Dielectric Etch I |
| Monday 2:00pm | PS2-MoA | Silicon Etching |
| Monday 5:00pm | PS-MoP | Plasma Science and Technology Poster Session |
| Tuesday 8:20am | PS+BI-TuM | Plasmas in Bioscience |
| Tuesday 8:20am | PS-TuM | Plasma Surface Interactions I |
| Tuesday 2:00pm | PS-TuA | Dielectric Etch II |
| Tuesday 4:00pm | PS-TuP | Plasma Science and Technology Poster Session |
| Wednesday 8:20am | PS+TF-WeM | Plasma Enhanced CVD and ALD |
| Wednesday 8:20am | PS-WeM | Advanced Gate Stack Fabrication |
| Wednesday 2:00pm | PS-WeA | Atmospheric Plasmas and Microdischarges |
| Thursday 8:20am | PS+MS-ThM | Process Equipment Modeling |
| Thursday 8:20am | PS-ThM | Plasma-Surface Interactions II |
| Thursday 2:00pm | PS+TF-ThA | Emerging Plasma Applications |
| Thursday 2:00pm | PS-ThA | Plasma Sources and Equipment |
| Friday 8:20am | PS-FrM | Plasma Surface Interactions III |