| AVS 52nd International Symposium | |
| Plasma Science and Technology | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 9:00am | PS-MoM3 Invited Paper Emissive Probes in Processing Plasmas - A Good Way to Measure the Plasma Potential N. Hershkowitz, D. Lee, University of Wisconsin |
| 9:40am | PS-MoM5 A New Diagnostic Method of Radio-Frequency Plasmas Produced in Insulated Vessels H. Shindo, Tokai Univeristy, Japan |
| 10:00am | PS-MoM6 Energy Dissipation in Capacitively Coupled Discharges of Molecular Gases G.F. Franz, Munich University of Applied Sciences, Germany |
| 10:20am | PS-MoM7 Spatial and Temporal Measurement of Electric Fields in a Plasma E.V. Barnat, Sandia National Laboratories |
| 10:40am | PS-MoM8 Modified Actinometry for Monitoring Atomic Radicals in Molecular Gas Discharge T. Ishijima, T. Okada, Y. Tanabe, H. Sugai, Nagoya University, Japan |
| 11:00am | PS-MoM9 Rare Gas and O Metastable Density in Rare Gas Diluted Oxygen RF Plasmas T. Kitajima, K. Takahashi, T. Nakano, National Defense Academy of Japan, T. Makabe, Keio University, Japan |
| 11:20am | PS-MoM10 Prediction of Plasma UV Radiation Damages Using On-wafer Monitoring Sensors Y. Kato, Y. Ishikawa, M. Okigawa, S. Samukawa, Tohoku University, Japan |
| 11:40am | PS-MoM11 Sheaths and Pre-sheaths in Collisionless and Collisional Active Plasmas: Planar and Cylindrical Probes F. Iza, J.K. Lee, Pohang University of Science and Technology (Postech), S. Korea |