AVS 52nd International Symposium
    Plasma Science and Technology Thursday Sessions

Session PS+TF-ThA
Emerging Plasma Applications

Thursday, November 3, 2005, 2:00 pm, Room 302
Moderator: H. Barankova, Uppsala University, Sweden


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm PS+TF-ThA1 Invited Paper
Emerging Plasma Deposition Applications
D.P. Monaghan, Gencoa, UK
2:40pm PS+TF-ThA3
Investigating the Plasma-Propellant Interaction through Experimental Modeling
R. Valliere, R. Blumenthal, Auburn University
3:00pm PS+TF-ThA4
PECVD of SiO@sub 2@ Thin Film from Electron-Beam Generated Plasmas
D. Leonhardt, S.G. Walton, US Naval Research Laboratory
3:20pm PS+TF-ThA5 Invited Paper
Nanoparticles and Nanocoatings from Plasmas: Old Problems with a New Twist
K.P. Giapis, California Institute of Technology
4:00pm PS+TF-ThA7
Effect of Substrate Material on Properties of TiN Films Deposited in the Hybrid Plasma Reactor
L. Bardos, H. Barankova, L.-E. Gustavsson, Uppsala University, Sweden
4:20pm PS+TF-ThA8
Synthesis of Aligned Carbon Nanotubes by RF-Plasma-Assisted DC Plasma Chemical Vapor Deposition
Y. Hayashi, T. Fukumura, Kyoto Institute of Technology, Japan, R. Utsunomiya, Nissin Electric Co. Ltd., Japan
4:40pm PS+TF-ThA9
In Situ Oxidation and Plasma Studies for Magnetic Tunnel Junctions: The Mechanism of Plasma Oxidation of Ultra-Thin Aluminum Films Unraveled
M.C.M. Van De Sanden, Eindhoven University of Technology, The Netherlands, K. Knechten, Oce Technology, The Netherlands, B. Koopmans, H.J.M. Swagten, W.J.M. de Jonge, Eindhoven University of Technology, The Netherlands
5:00pm PS+TF-ThA10
High Density Plasma Processing of Si Nanocrystal Embedded SiO@sub x@ Thin Films
P.C. Joshi, T.K. Li, W. Gao, Y. Ono, A.T. Voutsas, J.W. Hartzell, S.T. Hsu, SHARP Labs of America, Inc.