AVS 49th International Symposium


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Plasma Science Sessions

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Start Time Session Code Session Title
Monday 8:20am PS-MoM Conductor Etch I
Monday 2:00pm PS1-MoA Dielectric Etch I
Monday 2:00pm PS2-MoA Plasma Processing for Large Area Substrates
Tuesday 8:20am PS+MS-TuM Plasma Diagnostics and Sensors
Tuesday 8:20am PS-TuM Atmospheric Pressure and Other Emerging Plasma Applications
Tuesday 2:00pm PS1-TuA Microdischarges
Tuesday 2:00pm PS2-TuA Plasma Surface Interactions I
Tuesday 5:30pm PS-TuP Plasma Applications
Wednesday 8:20am PS+NT-WeM Plasma Science and Technology for Nanostructures
Wednesday 8:20am PS-WeM Conductor Etch II
Wednesday 11:00am PS+TF-WeP Plasma Etching & Deposition
Wednesday 2:00pm PS+BI-WeA Plasma Processing for Biocompatible Surfaces
Wednesday 2:00pm PS+MM-WeA Feature Profile Evolution /Plasma Processing for MEMS
Thursday 8:20am PS+TF-ThM Plasma Enhanced Deposition
Thursday 2:00pm PS-ThA Dielectric Etch II
Friday 8:20am PS-FrM Plasma Surface Interactions II

AVS 49th International Symposium