AVS 49th International Symposium
    Plasma Science Wednesday Sessions

Session PS+NT-WeM
Plasma Science and Technology for Nanostructures

Wednesday, November 6, 2002, 8:20 am, Room C-103
Moderator: V.I. Merkulov, Oak Ridge National Laboratory


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Click a paper to see the details. Presenters are shown in bold type.

8:20am PS+NT-WeM1
Plasma Enhanced Chemical Vapor Deposition of a Dense SiO@sub 2@ Cap Layer on Low-k Nanostructured Porous Silica
Y.B. Jiang, N. Liu, C.J. Brinker, J.L. Cecchi, University of New Mexico
8:40am PS+NT-WeM2
RIE processes of Formation of Nanometer-Scale Dot Arrays
Y. Zhang, K.W. Guarini, E. Sikorski, C.T. Black, T.J. Dalton, IBM T.J. Watson Research Center
9:00am PS+NT-WeM3 Invited Paper
Efficient Production of Single-Wall Carbon Nanotubes by Means of the Gravity-free Gas Arc Dischargee
T. Mieno, Shizuoka University, Japan, M. Kanai, University of London, UK, H. Shinohara, Nagoya University, Japan
9:40am PS+NT-WeM5
Patterned Growth of Vertically Aligned Carbon Nanofibers using a High Density Plasma Enhanced Chemical Vapor Deposition Process
J.B.O. Caughman, L.R. Baylor, M.A. Guillorn, V.I. Merkulov, D.H. Lowndes, Oak Ridge National Laboratory
10:00am PS+NT-WeM6
Carbon Nanotubes by ICP-CVD: Growth, Characterization, Plasma Diagnostics, and Modeling
D.B. Hash, L. Delzeit, K. Matthews, NASA Ames Research Center, B.A. Cruden, Eloret Corporation, M. Meyyappan, NASA Ames Research Center
10:20am PS+NT-WeM7
Zinc Oxide Nanowires Grown by Plasma Assisted Chemical Vapor Deposition
J.B. Baxter, E.S. Aydil, University of California, Santa Barbara