AVS 46th International Symposium
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Monday 8:20am | PS-MoM | Plasma Damage |
| Monday 2:00pm | PS-MoA | Plasma Diagnostics I |
| Monday 5:30pm | PS-MoP | Poster Session |
| Tuesday 8:20am | PS-TuM | Plasma-Surface Interactions I |
| Tuesday 2:00pm | PS-TuA | Plasma Diagnostics II |
| Wednesday 8:20am | PS-WeM | Feature Profile Evolution |
| Wednesday 8:20am | SS2+AS+PS-WeM | Ion-Surface Interactions I |
| Wednesday 2:00pm | PS+SS-WeA | Ion-Surface Interactions II |
| Wednesday 2:00pm | PS-WeA | Dielectric Etching |
| Thursday 8:20am | PS-ThM | Plasma-Surface Interactions II |
| Thursday 8:20am | MS+PS-ThM | Environmentally Benign Manufacturing |
| Thursday 2:00pm | PS1-ThA | High Fidelity Pattern Transfer |
| Thursday 2:00pm | PS2-ThA | Pulsed Plasmas |
| Friday 8:20am | PS-FrM | Emerging Plasma Applications |
| Friday 8:20am | MS+PS-FrM | Diagnostics and Processes in Etching |