AVS 45th International Symposium
Wednesday November 4, 1998 Sessions
Click a title to see the papers
ORAL SESSIONS
Room
WeM
Wednesday, 11/4/98, 8:20am
WeA
Wednesday, 11/4/98, 2:00pm
307
AS+BI+SS-WeM
Organized Molecular Monolayers
AS-WeA
Polymer Surfaces, Films and Interfaces
308
SS1-WeM
Physics of Semiconductors
SS1-WeA
Electromigration and Surface Transport
309
SS2-WeM
Gas-Surface Dynamics
SS2-WeA
Photochemistry and Deposition
310
TF-WeM
ULSI Metalization and Interconnects
TF-WeA
Advances in Sputtering
314/315
SS3-WeM
Surface Dynamics and Roughening
EM1-WeA
Si Surface Chemistry
316
EM-WeM
Fundamentals of Si Cleaning and CMP
EM2-WeA
Application of Scanning Probes to Electronic Materials
317
MS-WeM
Advanced Process Equipment and ES&H
MS-WeA
Process Control and Yield from Tool to Factory
318/319/320
PS-WeM
Plasma Damage
PS-WeA
Plasma-Surface Interactions I
321/322/323
NS+AS-WeM
Innovative Force, Near-Field Optics, and Tunneling Measurements
324/325
MI+EM-WeM
Spin-dependent Devices: Technology and Processing
MI+NS-WeA
Nanoscale Magnetics: Imaging and Fabrication
326
327
SE-WeM
Selected Energy Epitaxial Growth Processes
SE-WeA
Novel Sources for Selected Energy Growth
328
329
VT-WeM
Vacuum Microelectronics
VT-WeA
Vacuum Systems and Components
AVS 45th International Symposium