AVS 62nd International Symposium & Exhibition

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Plasma Science and Technology Sessions

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Start Time Session Code Session Title
Monday 8:20am PS+SE-MoM Atmospheric Pressure Plasma Processing I
Monday 8:20am PS-MoM Advanced FEOL/Gate Etching
Monday 8:20am 2D+EM+NS+PS+SP+SS+TF-MoM 2D Materials: Growth and Fabrication
Monday 8:20am EM+NS+PS-MoM More Moore! Materials and Processes to Extend CMOS Another Decade
Monday 2:20pm PS+EM-MoA Directed Self Assembly and Plasma Synthesis of Novel Materials
Monday 2:20pm PS-MoA Plasma Diagnostics, Sensors and Control I
Monday 2:20pm EM+NS+PS-MoA More Moore! II
Tuesday 8:00am PS+BI+SM-TuM Plasmas for Medicine and Biological Applications
Tuesday 8:00am PS-TuM Advanced BEOL/Interconnect Etching
Tuesday 8:00am SE+PS+SM-TuM Atmospheric Pressure Plasmas, CVD and Other Deposition Methods
Tuesday 2:20pm PS1-TuA Novel Materials and Etch Chemistry
Tuesday 2:20pm PS2-TuA Plasma Modeling
Tuesday 2:20pm EM+MN+PS-TuA More than Moore: Novel Approaches for Increasing Integrated Functionality
Tuesday 2:20pm SE+PS-TuA Pulsed Plasmas in Surface Engineering
Wednesday 8:00am PS+2D+SE-WeM Plasma Diagnostics, Sensors and Control II
Wednesday 8:00am PS+SS+TF-WeM Atomic Layer Etching (ALE) and Low-Damage Processes I
Wednesday 2:20pm PS+AS+SS-WeA Plasma Surface Interactions
Wednesday 2:20pm PS+TF-WeA Plasma Deposition and Plasma Assisted ALD
Thursday 8:00am PS+2D-ThM Plasma Processing for 2D Materials
Thursday 8:00am SM+AS+BI+PS-ThM Plasma Processing of Biomaterials
Thursday 8:00am TF+EM+NS+PS+SM-ThM Plasma ALD and Nano-applications
Thursday 2:20pm PS+AP+SE-ThA Advanced Ion Implantation and Plasma Doping
Thursday 2:20pm PS-ThA Plasma Sources
Thursday 2:20pm SD+AS+EM+PS-ThA Process Development for Selective Deposition and Self-aligned Patterning
Thursday 2:20pm SM+AS+BI+PS-ThA Plasma Processing of Biomaterials and Biological Systems
Thursday 2:20pm TF+PS-ThA Thin Film Permeation Barriers and Membranes
Thursday 6:00pm PS-ThP Plasma Science and Technology Poster Session
Friday 8:20am PS+SE-FrM Atmospheric Pressure Plasma Processing II
Friday 8:20am PS+SS+TF-FrM Atomic Layer Etching (ALE) and Low-Damage Processes II
Friday 8:20am 2D+EM+IS+NS+PS+SP+SS-FrM Surface Chemistry of 2D Materials: Functionalization, Membranes, Sensors

AVS 62nd International Symposium & Exhibition