| AVS 62nd International Symposium & Exhibition | |
| Electronic Materials and Processing | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:20pm | EM+NS+PS-MoA1 Effect of Ex Situ and In Situ Surface Cleaning on the Quality of Al2O3-SiGe(001) Interfaces K. Sardashti, Kai-Ting Hu, UC San Diego, S. Madisetti, College of Nanoscale Science and Engineering, Albany-SUNY, K. Tang, Stanford University, S. Oktyabrsky, College of Nanoscale Science and Engineering, Albany-SUNY, P.C. McIntyre, Stanford University, S. Siddiqui, B. Sahu, Globalfoundries, N. Yoshida, J. Kachian, Applied Materials Inc., A.C. Kummel, UC San Diego |
| 2:40pm | EM+NS+PS-MoA2 Surface Passivation for ALD-Al2O3/SiGe MOS Devices Liangliang Zhang, Stanford University, V. Hassan, C. Lo, C. Olsen, M.A. Foad, Applied Materials Inc., P.C. McIntyre, Stanford University |
| 3:00pm | EM+NS+PS-MoA3 Invited Paper Harnessing Chemistry to deliver Materials and Process for theNext 10 Years of CMOS Evolution Robert Clark, TEL Technology Center, America, LLC |
| 3:40pm | EM+NS+PS-MoA5 Invited Paper Materials Selection for Oxide-based Resistive Random Access Memory (RRAM) John Robertson, Y. Guo, Cambridge University, United Kingdom of Great Britain and Northern Ireland |
| 4:20pm | EM+NS+PS-MoA7 Lower Temperature Silicon Nitride ALD on Si0.5Ge0.5(110) with No Solid By-product Formation Steven Wolf, M. Edmonds, T. Kent, University of California at San Diego, D. Alvarez, RASIRC, R. Droopad, Texas State University, A.C. Kummel, University of California at San Diego |
| 4:40pm | EM+NS+PS-MoA8 Novel Delivery of Unstable Precursors for Atomic Layer Deposition Daniel Alvarez, J. Spiegelman, E. Heinlein, R. Holmes, C. Ramos, S. Webb, K. Johnson, RASIRC |
| 5:00pm | EM+NS+PS-MoA9 Passivation and Functionalization of SiGe(001) and (110) for ALD Nucleation in FinFET Structure SangWook Park, H. Kim, University of California at San Diego, B. Sahu, S. Siddiqui, GLOBALFOUNDRIES U.S. Inc., N. Yoshida, A. Brandt, Applied Materials, Inc., E. Chagarov, A.C. Kummel, University of California at San Diego |
| 5:20pm | EM+NS+PS-MoA10 Band Structure and Critical Points of Pseudomorphic Ge1-ySny Alloys on Ge Nalin Fernando, T.N. Nunley, S. Zollner, New Mexico State University, D. Zhang, R. Hickey, J. Kolodzey, University of Delaware |