AVS 62nd International Symposium & Exhibition | |
Electronic Materials and Processing | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
8:20am | EM+NS+PS-MoM1 Effects of Deposition Temperature and Pre-rapid Thermal Process on Electrical and Interfacial Characteristics of Alumina on GaSb Seongkyung Kim, H.J. kim, Seoul National University, Korea, Republic of Korea |
8:40am | EM+NS+PS-MoM2 Selective Wet Etching of III-V Semiconductors with HCl and H2O2 Pablo Mancheno-Posso, . Jain, A.J. Muscat, University of Arizona |
9:00am | EM+NS+PS-MoM3 Border Trap Analysis and Reduction for ALD High-k InGaAs Gate Stacks Kechao Tang, Stanford Univ., R. Winter, Technion – Israel Inst. of Tech., T. Kent, UC, San Diego, M. Negara, Stanford Unive., R. Droopad, Texas State Univ., A.C. Kummel, UC, San Diego, M. Eizenberg, Technion – Israel Inst. of Tech., P. McIntyre, Stanford Univ. |
9:20am | EM+NS+PS-MoM4 Self-LIMITING CVD of an Air Stable Silicon Oxide Bilayer for Preparation of Subsequent Silicon or Gate Oxide ALD on InGaAs(001)-(2x4) Mary Edmonds, T. Kent, S. Wolf, University of California at San Diego, J. Kachian, N. Yoshida, M. Chang, Applied Materials, D. Alverez, Rasirc, Inc, R. Droopad, Texas State University, A.C. Kummel, University of California at San Diego |
9:40am | EM+NS+PS-MoM5 Invited Paper Going Big in Two-Dimensions Joshua Robinson, The Pennsylvania State University |
10:40am | EM+NS+PS-MoM8 Invited Paper 2D Bipolar Devices for Novel Logic Applications: Fabrication, Characterization and Applications Ji Ung Lee, SUNY Polytechnic Institute |
11:20am | EM+NS+PS-MoM10 Invited Paper Electron Transport and Tunneling in Graphene-based Heterostructures Emanuel Tutuc, The University of Texas at Austin |