AVS 62nd International Symposium & Exhibition
    Electronic Materials and Processing Monday Sessions

Session EM+NS+PS-MoM
More Moore! Materials and Processes to Extend CMOS Another Decade

Monday, October 19, 2015, 8:20 am, Room 210E
Moderator: Christopher Hinkle, University of Texas at Dallas


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am EM+NS+PS-MoM1
Effects of Deposition Temperature and Pre-rapid Thermal Process on Electrical and Interfacial Characteristics of Alumina on GaSb
Seongkyung Kim, H.J. kim, Seoul National University, Korea, Republic of Korea
8:40am EM+NS+PS-MoM2
Selective Wet Etching of III-V Semiconductors with HCl and H2O2
Pablo Mancheno-Posso, . Jain, A.J. Muscat, University of Arizona
9:00am EM+NS+PS-MoM3
Border Trap Analysis and Reduction for ALD High-k InGaAs Gate Stacks
Kechao Tang, Stanford Univ., R. Winter, Technion – Israel Inst. of Tech., T. Kent, UC, San Diego, M. Negara, Stanford Unive., R. Droopad, Texas State Univ., A.C. Kummel, UC, San Diego, M. Eizenberg, Technion – Israel Inst. of Tech., P. McIntyre, Stanford Univ.
9:20am EM+NS+PS-MoM4
Self-LIMITING CVD of an Air Stable Silicon Oxide Bilayer for Preparation of Subsequent Silicon or Gate Oxide ALD on InGaAs(001)-(2x4)
Mary Edmonds, T. Kent, S. Wolf, University of California at San Diego, J. Kachian, N. Yoshida, M. Chang, Applied Materials, D. Alverez, Rasirc, Inc, R. Droopad, Texas State University, A.C. Kummel, University of California at San Diego
9:40am EM+NS+PS-MoM5 Invited Paper
Going Big in Two-Dimensions
Joshua Robinson, The Pennsylvania State University
10:40am EM+NS+PS-MoM8 Invited Paper
2D Bipolar Devices for Novel Logic Applications: Fabrication, Characterization and Applications
Ji Ung Lee, SUNY Polytechnic Institute
11:20am EM+NS+PS-MoM10 Invited Paper
Electron Transport and Tunneling in Graphene-based Heterostructures
Emanuel Tutuc, The University of Texas at Austin