AVS 62nd International Symposium & Exhibition
    Plasma Science and Technology Thursday Sessions

Session PS+2D-ThM
Plasma Processing for 2D Materials

Thursday, October 22, 2015, 8:00 am, Room 210A
Moderator: Eric Hudson, Lam Research Corporation


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am PS+2D-ThM1 Invited Paper
Low Pressure Plasma Cleaning and Doping of CVD Graphene
Daniil Marinov, LPP-CNRS, Ecole Polytechnique, France, G. Cunge, LTM - CEA/LETI, France, D. Ferrah, CEA, LETI, MINATEC Campus, France, E.V. Johnson, LPICM-CNRS, Ecole Polytechnique, France, J.-P. Booth, LPP-CNRS, Ecole Polytechnique, France
8:40am PS+2D-ThM3
Sensing Cleanliness of PMMA Transferred CVD Grown Graphene
Christian Teichert, M.C. Kratzer, Montanuniversität Leoben, Austria, B.C. Bayer, University of Cambridge, UK
9:00am PS+2D-ThM4 Invited Paper
Plasma Processes of Graphene and Related 2d Materials for Energy Applications
L.C. Chen, Indrajit Shown, National Taiwan University, Taiwan, Republic of China
11:00am PS+2D-ThM10
Engineering Chemical Functionality in Graphene
Sandra Hernandez, P.E. Sheehan, S. Tsoi, P. Dev, J.T. Robinson, C. Junkermeier, K.E. Whitener, W.K. Lee, T.L. Reinecke, S.G. Walton, Naval Research Laboratory
11:20am PS+2D-ThM11
Formation of Aromatic Nitrogen Groups in Graphene Films by Post-Growth Treatment in Late-Afterglows of Nitrogen Microwave Plasmas
Luc Stafford, Universite de Montreal, Canada