AVS 53rd International Symposium
Monday November 13, 2006 Sessions
Click a title to see the papers
ORAL SESSIONS
Room
MoM
Monday, 11/13/06, 8:00am
MoA
Monday, 11/13/06, 2:00pm
2000
2000a
2001
2002
SS1-MoM
Catalytic Chemistry of Hydrocarbons
SS1-MoA
Catalysis for the Hydrogen Economy
2003
EM-MoA
Contacts, Interfaces and Defects in Semiconductors
2004
SS2-MoM
Gas-Surface Reaction Dynamics
SS2-MoA
Functionalization of Semiconductor Surfaces
2005
AS+BI+NS+NM-MoM
Organic Surface Modification and Nanoscale Chemical Patterning
AS-MoA
Developing Methods for Data Analysis
2006
2007
MN+BI-MoA
Surface and Interface Science of MEMS and NEMS
2007a
2009
PS1-MoM
Etch for Advanced Interconnect I
PS-MoA
Manufacturing and Scientific Challenges for Plasma Processing at 32 nm
2011
PS2-MoM
Advanced Gate Fabrication
2014
DN-MoM
Nucleic Acids at Surfaces I
DN-MoA
Nucleic Acids at Surfaces II
2016
NS-MoM
Nanoscale Imaging Techniques
NS-MoA
Nanoscale Structures and Characterization I
2018
NM+IPF-MoM
Examples of Nanotechnology Manufacturing
NM+MS+IPF-MoA
Beyond CMOS: Emerging Materials and Devices
2020
2022
TF-MoM
ALD and Applications I
TF-MoA
ALD and Applications II
Exhibit Hall
AVS 53rd International Symposium