| AVS 53rd International Symposium | |
| MEMS and NEMS | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | MN+BI-MoA1 Invited Paper A New Technique for Studying Nanoscale Friction at Sliding Velocities up to 400 mm/s Using Atomic Force Microscope B. Bhushan, Z. Tao, The Ohio State University |
| 2:40pm | MN+BI-MoA3 Novel and Direct Functionalization of PECVD SiCN for Resonant NEMS Biosensor Applications L.M. Fischer, National Institute for Nanotechnology, Canada, N. Wilding, University of Alberta, Canada, M. Gel, National Institute for Nanotechnology, Canada, N. Yang, M.T. McDermott, University of Alberta, Canada, S. Evoy, National Institute for Nanotechnology, Canada |
| 3:00pm | MN+BI-MoA4 Energy Dissipation in Chemically Functionalized Micromechanical Silicon Resonators D. Sengupta, A.M. Richter, I.T. Clark, M.A. Hines, Cornell University |
| 3:20pm | MN+BI-MoA5 Role of Metal Impurities in Anisotropic Wet Chemical Etching T. Hynninen, A.S. Foster, Helsinki University of Technology, Finland, M. Gosálvez, H. Tanaka, Nagoya University, Japan, R.M. Nieminen, Helsinki University of Technology, Finland, K. Sato, Nagoya University, Japan |
| 3:40pm | MN+BI-MoA6 Interfacial Properties of Polymer Interfaces for BioMEMS/NEMS Applications M. Palacio, B. Bhushan, N. Ferrell, The Ohio State University |
| 4:00pm | MN+BI-MoA7 Nanotribological Characterization of Vapor "Phase Deposited Positively-Charged Self"Assembled Monolayers Deposited on Polydimethylsiloxane for Nanochannel Application M. Cichomski, B. Bhushan, The Ohio State University |
| 4:40pm | MN+BI-MoA9 Micro-Reservoir Arrays for Chemical Delivery J.J. VanDersarl, N.A. Melosh, Stanford University |