AVS 49th International Symposium, Thursday, 11/7/2002 Sessions

Thursday November 7, 2002 Sessions

Click a title to see the papers

Room	ThM Thursday, 11/7/02, 8:20am	ThA Thursday, 11/7/02, 2:00pm
C-101		TF-ThA Ultra Thin Films
C-102
C-103	PS+TF-ThM Plasma Enhanced Deposition	PS-ThA Dielectric Etch II
C-104	VT-ThM Gas Dynamics and Flow
C-105
C-106	AS-ThM Practical Surface Science I	AS-ThA Practical Surface Science II
C-107	DI+EL-ThM Issues for Gate Dielectrics	DI+EL-ThA Processing and Properties of Dielectric Materials
C-108	SS-ThM Electronic Structure and Stimulated Processes
C-109	PN+SS-ThM Patterning and Functionalization	PN-ThA Charged Particle Patterning and Emission
C-110	SS+EL-ThM Structure of Semiconductor Surfaces & Interfaces	SS-ThA Tribology at Surfaces
C-111B	PH-ThM Photonic Nanostructures	PH-ThA Optical Lightguides
C-112C	SS+EL+OF-ThM Reactions and Patterning of Organics on Silicon	SS+EL-ThA Growth & Etching on Semiconductor Surfaces
C-201	BI+HS+SS-ThM Biosensors and Biodiagnostics	BI-ThA Cell Patterning to Engineer Function
C-205	MI+SS-ThM Magnetic Spectroscopies	MI+NS-ThA Magnetic Imaging
C-207	NS-ThM Single Molecule Devices	NS-ThA Nanowires
C-209
C-210	MM+TF-ThM Development and Characterization of MEMS Materials	MM-ThA Fabrication, Integration, and Packaging Techniques for MEMS