| AVS 49th International Symposium | |
| Processing at the Nanoscale | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | PN-ThA1 Nanoscale Electron Beam Stimulated Processing P.D. Rack, R.C. Burns, Y. Deng, Y. Choi, D.C. Joy, University of Tennessee |
| 2:20pm | PN-ThA2 Electron Beam Patterning with Carboneous Contamination Rezists below 10 nm Linewidth M. Malac, University of Alberta, Canada, J. Lau, Brookhaven National Laboratory, R. Egerton, M. Freeman, University of Alberta, Canada, Y. Zhu, Brookhaven National Laboratory |
| 2:40pm | PN-ThA3 A Study of PMMA EBL Cross-sections Prepared by a Novel Process W. Hu, T. Orlova, G.H. Bernstein, University of Notre Dame |
| 3:00pm | PN-ThA4 Nanometer Scale Patterning of Dielectric Surfaces with Combined Electron/laser Beams and Chemical Exposure K.H. Nwe, J.T. Dickinson, Washington State University |
| 3:20pm | PN-ThA5 Field Emitter Arrays with Sharp Tips for THz Microwave Source C. Peng, S.W. Pang, The University of Michigan |
| 3:40pm | PN-ThA6 Structure and Field Emission Properties of SiC Nanotip Arrays Fabricated by Electron-cyclotron-resonance Plasma Process of Monolithic Si Wafer L.C. Chen, National Taiwan University, H.C. Lo, J.S. Hwang, J.S. Hsu, Institute of Atomic and Molecular Sciences, C.F. Chen, National Chiao-Tung University, Taiwan, D. Das, K.H. Chen, Institute of Atomic and Molecular Sciences |
| 4:00pm | PN-ThA7 Field Emission from Well-Aligned Heterojunctions of Carbon Nanotubes and Silicon Nanowires M. Lu, M.-K. Li, H.-L. Li, Lanzhou University, P.R. China |
| 4:20pm | PN-ThA8 Evolution of Surface Morphology and Microstructure during Ion Sputtering of Diamond D.P. Adams, T.M. Mayer, M.J. Vasile, Sandia National Laboratories |
| 4:40pm | PN-ThA9 Invited Paper Nanoscale Morphology Control Using Ion Beams M.J. Aziz, Harvard University |