AVS 49th International Symposium
    Surface Science Thursday Sessions

Session SS+EL-ThA
Growth & Etching on Semiconductor Surfaces

Thursday, November 7, 2002, 2:00 pm, Room C-112C
Moderator: A.C. Kummel, University of California, San Diego


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Click a paper to see the details. Presenters are shown in bold type.

2:00pm SS+EL-ThA1 Invited Paper
Epitaxial Growth Dynamics of Semiconductor Quantum Dot Structures
S.R. Leone, University of California and Lawrence Berkeley National Laboratory
2:40pm SS+EL-ThA3
Si Deposition on H-terminated Si(100) Surfaces@footnote *@
J.-Y. Ji, T.T. Barus, T.-C. Shen, Utah State University, G. Qian, University of Illinois at Urbana-Champaign, X. Luo, National Renewable Energy Laboratory, S. Ren, Illinois State University, S. Zhang, National Renewable Energy Laboratory, Y.C. Chang, University of Illinois at Urbana-Champaign
3:00pm SS+EL-ThA4
An Atom-Resolved Study of Vacancy Dynamics and Surface Roughening on Bromine-Etched Si(100) Surfaces
C.F. Herrmann, J.J. Boland, University of North Carolina, Chapel Hill
3:20pm SS+EL-ThA5
Dynamics of Si(100)-(2x1) Surface Modification with Cl
G. Xu, E. Graugnard, V. Petrova, K.S. Nakayama, J.H. Weaver, University of Illinois at Urbana-Champaign
3:40pm SS+EL-ThA6
Surface Modification without Desorption: Recycling of Cl on Si(100)-(2x1)
K.S. Nakayama, E. Graugnard, J.H. Weaver, University of Illinois at Urbana-Champaign
4:00pm SS+EL-ThA7
Spontaneous Roughening -- Fundamental Limits in Si(100) Halogen Etch Processing
D. Chen, J.J. Boland, University of North Carolina at Chapel Hill
4:20pm SS+EL-ThA8
Preparation of Atomically Flat Si(100) Surface by Ion Etching
J. Kim, J.-Y. Ji, T.-C. Shen, Utah State University, J.S. Kline, J.R. Tucker, University of Illinois
4:40pm SS+EL-ThA9
Probing the Chemistry of Impurities with STM: The Profound Effect of Dissolved Oxygen on Silicon Etching
S.P. Garcia, H. Bao, M.A. Hines, Cornell University