| AVS 49th International Symposium | |
| Microelectromechanical Systems (MEMS) | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MM+TF-ThM1 Invited Paper Tetrahedral Amorphous-carbon (ta-C) for MEMS Applications T.A. Friedmann, J.P. Sullivan, R.V. Ellis, T.M. Alam, M.P. de Boer, T.E. Buchheit, Sandia National Laboratories |
| 9:00am | MM+TF-ThM3 Invited Paper Challenges of Compressible Microfluidics and MEMS Device Development C.B. Freidhoff, Northrop Grumman ES, E. Hong, The Pennsylvania State University, R.L. Smith, University of Maryland-Baltimore County, T.T. Braggins, S.V. Krishnaswamy, Northrop Grumman ES, S. Trolier-McKinstry, The Pennsylvania State University |
| 9:40am | MM+TF-ThM5 Micro-Mechanical Characterization of Indium Phosphide (InP) for Active Optical MEMS Applications M.W. Pruessner, University of Maryland, T. King, NASA Goddard Space Flight Center, D. Kelly, R. Ghodssi, University of Maryland |
| 10:00am | MM+TF-ThM6 Stiction/Friction Studies of MEMS Materials Using a Novel Microtriboapparatus H. Liu, B. Bhushan, The Ohio State University |
| 10:20am | MM+TF-ThM7 Free-standing Single-crystal Ni@sub2@MnGa Thin Films: A New Functional Material for MEMS J.W. Dong, J.Q. Xie, J. Lu, Q. Pan, J. Cui, S. McKernan, R.D. James, C.J. Palmstrom, University of Minnesota |
| 10:40am | MM+TF-ThM8 A New Approach to Electrical Characterization of Spin-on Dielectrics for Power MEMS Applications A. Modafe, R. Ghodssi, University of Maryland |
| 11:00am | MM+TF-ThM9 Physics of Metal Micro-contact Events in Micro-Electro-Mechanical (MEM) Relays J.W. Tringe, T.A. Uhlman, Air Force Research Laboratory, A.C. Oliver, J.E. Houston, Sandia National Laboratories |
| 11:20am | MM+TF-ThM10 Growth and Characterization of Doped 3C-SiC Films for Micro- and Nanoelectromechanical Systems A.J. Fleischman, C.A. Zorman, M. Mehregany, Case Western Reserve University |
| 11:40am | MM+TF-ThM11 Incorporating Chemically Functional Materials on MEMS Structures S. Semancik, R.E. Cavicchi, N.O. Savage, C.J. Taylor, D.C. Meier, C.B. Montgomery, National Institute of Standards and Technology |