| AVS 49th International Symposium | |
| Microelectromechanical Systems (MEMS) | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | MM-ThA1 Invited Paper Addressing MEMS Reliability Through Innovative Fabrication, Integration, and Packaging Techniques V.M. Bright, University of Colorado, Boulder |
| 2:40pm | MM-ThA3 Invited Paper Development of Individually Addressable Micro-Mirror-Array for Space Applications S.B. Dutta, NASA, Goddard Space Flight Center |
| 3:20pm | MM-ThA5 Transformer Coupled Plasma Etching of Polycrystalline 3C-SiC Films for MEMS Applications D. Gao, M.B.J. Wijesundara, C. Carraro, R.T. Howe, R. Maboudian, University of California at Berkeley |
| 3:40pm | MM-ThA6 MEMS-based Gray-scale Technology C.M. Waits, A. Modafe, R. Ghodssi, University of Maryland |
| 4:00pm | MM-ThA7 Thick and Thermally Isolated Si Microheaters for Preconcentrators W.-C. Tian, S.W. Pang, The University of Michigan |
| 4:20pm | MM-ThA8 Silicon Nitride Micromesh Bolometric Detectors for Planck M. Yun, T. Koch, J. Bock, W. Holmes, Jet Propulsion Laboratory, A. Lange, California Institute of Technology |
| 4:40pm | MM-ThA9 Piezoelectric MEMS for RF Filter Applications A. Wickenden, B. Piekarski, L. Currano, J. Pulskamp, R.G. Polcawich, E. Zakar, R. Piekarz, D. Washington, J. Conrad, M. Dubey, U.S. Army Research Laboratory |
| 5:00pm | MM-ThA10 Micro-Thermal Conductivity Detector for Chemical Sensing D. Cruz, UCLA and Sandia National Laboratories, J.P. Chang, University of California, Los Angeles, F. Gelbard, R.P. Manginell, S.K. Showalter, L.J. Sanchez, S.S. Sokolowski, M.G. Blain, Sandia National Laboratories |