AVS 56th International Symposium & Exhibition, Plasma Science and Technology Sessions

Plasma Science and Technology Sessions

Click a session title to see the papers

Start Time	Session Code	Session Title
Monday 8:20am	PS1-MoM	Advanced Interconnect Etch
Monday 8:20am	PS2+PV-MoM	Plasma Processing for Photovoltaics
Monday 8:20am	SE2-MoM	Pulsed Plasmas in Surface Engineering
Monday 2:00pm	PS+MS-MoA	Plasma Challenges at the 22nm Node and Beyond
Tuesday 8:00am	PS1-TuM	Advanced FEOL and BEOL Etch
Tuesday 8:00am	PS2-TuM	Atmospheric Plasma Processing and Microplasmas
Tuesday 2:00pm	PS-TuA	Fundamentals of Plasma-Surface Interactions I
Tuesday 2:00pm	SS1+PS+TF+AS+NS-TuA	Non-Thermal Chemistry / Ion, Electron Processes
Tuesday 6:00pm	PS-TuP	Plasma Science and Technology Poster Session
Wednesday 8:00am	PS1-WeM	Plasma Diagnostics, Sensors, and Control I
Wednesday 8:00am	PS2+TF-WeM	Plasma Deposition and Plasma-assisted ALD
Wednesday 2:00pm	PS1-WeA	Plasma Modeling
Wednesday 2:00pm	PS2+MN-WeA	High Aspect Ratio and Deep Etching for 3D Integration and Memory
Thursday 8:00am	PS1-ThM	Applications of Plasma-Surface Interactions
Thursday 8:00am	PS2-ThM	Plasma Sources
Thursday 2:00pm	PS1-ThA	Fundamentals of Plasma-Surface Interactions II
Thursday 2:00pm	PS2-ThA	Plasma Diagnostics, Sensors, and Control II
Thursday 6:00pm	PS-ThP	Plasma Science Poster Session
Friday 8:20am	PS-FrM	Plasma Science for Medical and Biological Applications