AVS 66th International Symposium & Exhibition, Atomic Scale Processing Focus Topic Sessions

Atomic Scale Processing Focus Topic Sessions

Click a session title to see the papers

Start Time	Session Code	Session Title
Monday 8:20am	AP+2D+EM+PS+TF-MoM	Area Selective Deposition and Selective-Area Patterning
Monday 1:40pm	2D+AP+EM+MI+MN+NS+PS+TF-MoA	Nanostructures including Heterostructures and Patterning of 2D Materials
Monday 1:40pm	2D+AP+EM+MI+NS+PS+TF-MoA	2D Materials Growth and Fabrication
Monday 1:40pm	TF+2D+AP+EL+SS-MoA	ALD and CVD: Nucleation, Surface Reactions, Mechanisms, and Kinetics
Tuesday 8:00am	EM+2D+AP+NS+PS-TuM	New Devices and Materials for Electronics and Photonics
Tuesday 8:00am	TF+AP-TuM	ALD and CVD: Precursors and Process Development
Tuesday 2:20pm	AP+EL+MS+PS+SS+TF-TuA	Advancing Metrology and Characterization to enable Atomic Layer Processing
Wednesday 8:00am	AP+BI+PS+TF-WeM	Surface Reaction Analysis and Emerging Applications of Atomic Scale Processing
Thursday 8:00am	AP+PS+TF-ThM	Thermal Atomic Layer Etching
Thursday 2:20pm	SS+2D+AP+AS+OX+SE-ThA	Dynamics at Surfaces/Reactions and Imaging of Oxide Surfaces
Thursday 6:30pm	AP-ThP	Atomic Scale Processing Poster Session