AVS 50th International Symposium
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Monday 8:20am | MS-MoM | Process and Equipment Integration and Development |
| Monday 2:00pm | MS-MoA | Challenges in Advanced Materials and New Processes for Semiconductor Manufacturing |
| Tuesday 8:20am | MS-TuM | Packaging and Role of Interface Engineering in IC Processing |
| Tuesday 2:00pm | MS-TuA | Directions in Semiconductor Device Scaling for the Next Decade |
| Tuesday 5:30pm | MS-TuP | Poster Session |
| Wednesday 8:20am | MS-WeM | Sensors, Metrology, and Control |
| Thursday 8:20am | VT+MS-ThM | Reproducibility, Precision, and Accuracy of Vacuum and Process Measurements |