| AVS 50th International Symposium | |
| Vacuum Technology | Thursday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | VT+MS-ThM1 Invited Paper Component Requirements for ALD Technology T.E. Seidel, Genus, Inc, J. Mason, A. Londergan, S. Ramanathan, Genus, Inc. |
| 9:00am | VT+MS-ThM3 Towards Improved Control of PVD Processes for Nano-Structured Me-aC:H Coatings@footnote 1@ M.A. Taher, B. Feng, A.G. Shull, Caterpillar Inc., B. Johs, G. Pribil, J.A. Woollam Company Inc., C.C. Klepper, E.P. Carlson, R.C. Hazelton, E.J. Yadlowsky, HY-Tech Research Corporation |
| 9:20am | VT+MS-ThM4 A Portable Reference Gas for InSitu Calibration of Residual Gas Analyzers R.E. Ellefson, W.P. Schubert, L.C. Frees, INFICON, Inc. |
| 10:00am | VT+MS-ThM6 Specific Reference Calibration - A More Practical Approach to Vacuum Reproducibilty G.D. Lempert, Soreq N.R.C., Israel |
| 10:20am | VT+MS-ThM7 Characterisation of a Fully Automated, Static Expansion Vacuum Standard at the National Physical Laboratory, UK J.C. Greenwood, P. Carroll, National Physical Laboratory, UK |
| 10:40am | VT+MS-ThM8 A New Look at the Modulated Bayard-Alpert Gauge B.R.F. Kendall, Elvac Laboratories, E. Drubetsky, Televac Division of The Fredericks Company |
| 11:00am | VT+MS-ThM9 Dose Reproducibility in Axcelis GSD Implanters Using Stabil-Ion Gauge R.C. Johnson, INNOViON Foundry Ion Implantation Engineering |
| 11:20am | VT+MS-ThM10 How Stable are Spinning Rotor Gauges R.F. Chang, National Institute of Standards and Technology |
| 11:40am | VT+MS-ThM11 Practical Procedures for the Frequency Corrections of the Spinning Rotor Gauge Residual Drag J. Setina, Institute of Metals and Technology, Slovenia |