| AVS 50th International Symposium | |
| Manufacturing Science and Technology | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | MS-TuA1 Invited Paper The Future of Chip Making Is Different --- Or Is It? R. Puhakka, VLSI Research |
| 2:40pm | MS-TuA3 Invited Paper Technology and Manufacturing Challenges in High Tech R.L. Wisnieff, IBM Corporation, S.M. Rossnagel, IBM T.J. Watson Research Center |
| 3:20pm | MS-TuA5 Invited Paper The Future of Semiconductor Lithography W.J. Trybula, International SEMATECH |
| 4:00pm | MS-TuA7 Invited Paper CMOS Scaling Limits and Opportunity for Nanoelectronics Y. Nishi, Stanford University |
| 4:40pm | MS-TuA9 Invited Paper John Bardeen and Transistor Physics H.R. Huff, International SEMATECH |