| AVS 50th International Symposium | |
| Manufacturing Science and Technology | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | MS-MoA1 Invited Paper Research and Challenges in Nano Mechanics and Materials K.P. Chong, National Science Foundation |
| 2:40pm | MS-MoA3 Invited Paper Opportunities and Challenges in the Materials Supply Chain for Semiconductor Manufacturing R.J. Richardson, Air Products and Chemicals, Inc. |
| 3:20pm | MS-MoA5 Invited Paper New Processes and Materials for Environmentally Benign Semiconductor Manufacturing F. Shadman, University of Arizona |
| 4:00pm | MS-MoA7 Invited Paper Sub-100 nm Copper Wiring Challenges and Solutions M. Xi, M. Yang, W.-F. Yau, J. Dukovic, A. Rosenfeld, N. Maity, Applied Materials |
| 4:40pm | MS-MoA9 Invited Paper Nanoporous Organosilicates for On-Chip Applications Using Sacrificial Macromolecular Porogens R.D. Miller, W. Volksen, H.-C. Kim, E. Connor, J.L. Hedrick, C.J. Hawker, T. Magbitang, V. Lee, IBM Almaden Research Center |