Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Monday 2:00pm | DI-MoA | High K Dielectrics I |
| Monday 5:30pm | DI1-MoP | High K Dielectrics Poster Session |
| Monday 5:30pm | DI2-MoP | Low K Dielectrics Poster Session |
| Tuesday 8:20am | DI-TuM | High K Dielectrics II |
| Tuesday 2:00pm | DI-TuA | High K Dielectrics III |
| Wednesday 8:20am | DI-WeM | Atomic Layer Deposition for Silicon Devices |
| Wednesday 2:00pm | DI-WeA | Low K Dielectrics |