| IUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on Solid Surfaces (ICSS-11) | |
| Dielectrics | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | DI-WeA1 Invited Paper Materials Issues and Recent Development of Low k Dielectrics for Advanced Interconnects P.S. Ho, The University of Texas at Austin |
| 3:40pm | DI-WeA6 Formation of Self-Assembled Molecular Layers on the Low Dielectric Porous Methyl Silsesquioxane J.C. Hu, C.W. Wu, L.J. Chen, National Tsing Hua University, Taiwan, R.O.C., C.H. Li, National Chiao Tung University, Taiwan, R.O.C., T.C. Chang, National Sun Yat-Sen University, Taiwan, R.O.C., C.J. Chu, Nanmat Technology Co., Taiwan, R.O.C. |
| 4:00pm | DI-WeA7 Temperature-dependent Current Transport in Low-k Inorganic Polymer Dielectrics J.W. Tringe, R.A.B. Devine, U.S. Air Force Research Laboratory |
| 4:20pm | DI-WeA8 Characterization of SiC Films for Cu/low-k Integration F.G. Celii, T. Tsui, R. Willecke, J. Large, Texas Instruments, Inc. |