AVS 63rd International Symposium & Exhibition
    Advanced Ion Microscopy Focus Topic Thursday Sessions

Session HI+MI+NS-ThA
Ion Beam Based Imaging and Nanofabrication

Thursday, November 10, 2016, 2:20 pm, Room 104A
Moderators: Jacques Gierak, LPN-CNRS, Shinichi Ogawa, AIST, Japan


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Click a paper to see the details. Presenters are shown in bold type.

2:20pm HI+MI+NS-ThA1 Invited Paper
Mask Repair Technology using Gas Field Ion Source
Anto Yasaka, F. Aramaki, T. Kozakai, O. Matsuda, Hitachi High-Tech Science Corporation, Japan
3:00pm HI+MI+NS-ThA3
Application of an Advanced Bi Cluster LMIS for TOF-SIMS Analysis at the Nano-scale
F. Kollmer, W. Paul, D. Rading, R. Moellers, ION-TOF GmbH, Germany, N.J. Havercroft, ION-TOF USA, E. Niehuis, Julia Zakel, ION-TOF GmbH, Germany
3:20pm HI+MI+NS-ThA4
Nanoscale Imaging and Characterization of Interface Driven Assembly of Soft Materials via He-Ion Beam Microscopy
Matthew Burch, A. Belianinov, D. Chang, Y. Luo, K. Hong, O.S. Ovchinikova, Oak Ridge National Laboratory
4:00pm HI+MI+NS-ThA6
Advances in Ex Situ Lift Out and Manipulation Techniques for FIB Applications
Lucille Giannuzzi, EXpressLO LLC
4:20pm HI+MI+NS-ThA7
Helium Ion Microscopy Imaging of Carbon Nanofoams from Hydrothermal Carbonization of Sucrose
A. Beyer, Natalie Frese, Bielefeld University, Germany, S.T. Mitchell, A. Bowers, K. Sattler, University of Hawaii, A. Gölzhäuser, Bielefeld University, Germany
4:40pm HI+MI+NS-ThA8
Nanofabrication Limits in Layered Ferroelectric Semiconductors via He-ion Beam
Alexei Belianinov, A. Ievlev, V. Iberi, H. Hysmith, M.A. Susner, M. McGuire, S. Jesse, S.V. Kalinin, O.S. Ovchinnikova, Oak Ridge National Laboratory
5:00pm HI+MI+NS-ThA9
Focused Ion Beam Technology Challenges for Circuit Edit
Yuval Greenzweig, Y. Drezner, A. Raveh, Intel Corporation
5:20pm HI+MI+NS-ThA10
Ion-milling of Graphene Nanostructures While Supported and Unsupported: Considerations of Graphene Contamination, Substrate Scattering and Beam Tailing
J. Swett, Lockheed Martin Space Systems Company, V. Iberi, D. Cullen, Adam Rondinone, Oak Ridge National Laboratory
5:40pm HI+MI+NS-ThA11
Interaction of Gas Field Ionized Nitrogen with Silicon
Marek Schmidt, Y. Oshima, L.T. Anh, X. Zhang, T. Kanzaki, M. Akabori, Japan Advanced Institute of Science and Technology, Japan, A. Yasaka, Hitachi High-Tech Science Corporation, Japan, M. Muruganathan, T. Shimoda, H. Mizuta, Japan Advanced Institute of Science and Technology, Japan
6:00pm HI+MI+NS-ThA12
Spatially Controlled Ripple Formation in the HIM using Low Voltages and High Temperatures
Gregor Hlawacek, L. Sottili, M. Engler, S. Facsko, Helmholtz-Zentrum Dresden Rossendorf, Germany