AVS 61st International Symposium & Exhibition

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Plasma Science and Technology Sessions

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Start Time Session Code Session Title
Monday 8:20am PS-MoM Current Challenges of Plasma Etching Technologies
Monday 8:20am 2D+EM+NS+PS+SS+TF-MoM 2D Materials Growth and Processing 
Monday 8:20am SE+EM+EN+PS+TF-MoM New Developments in Atmospheric Pressure Plasma Deposition and Thin Films for Energy Applications
Monday 8:20am TF+PS+SE-MoM Advanced PVD Methods 
Monday 8:20am TF+PS-MoM Atmospheric, Roll-to-Roll and other Manufacturing Advances in ALD
Monday 2:00pm PS-MoA Advanced FEOL/Gate Etching
Monday 2:00pm SE+PS+TF-MoA Pulsed Plasmas in Surface Engineering
Monday 2:00pm TF+PS-MoA ALD Surface Reactions and Precursors
Tuesday 8:00am PS-TuM Plasma Surface Interactions I
Tuesday 8:00am 2D+AS+BI+PS+SS-TuM 2D Materials: Surface Chemistry, Functionalization, Bio and Sensor Applications
Tuesday 8:00am TF+PS-TuM ALD for Emerging Applications
Tuesday 2:20pm PS-TuA Advanced BEOL/Interconnect Etching
Tuesday 2:20pm 2D+AS+HI+MC+NS+PS+SP+SS-TuA 2D Materials Characterization including Microscopy and Spectroscopy 
Tuesday 2:20pm TF+EN+PS-TuA ALD for Energy
Tuesday 6:30pm PS-TuP Plasma Science and Technology Poster Session
Wednesday 8:00am PS1-WeM Plasma Based Ion Implantation and Ion-Surface Interactions
Wednesday 8:00am PS2-WeM Plasma Modeling
Wednesday 8:00am TF+MS+PS-WeM Applied ALD: Nanoelectronics and Emerging Applications
Wednesday 2:20pm PS+2D-WeA Plasma Processing for 2D Materials, Coating, and Surface Modification
Wednesday 2:20pm PS-WeA Plasma Diagnostics, Sensors, and Control
Wednesday 2:20pm MN+PS-WeA Emerging Materials and Fabrication Technologies for MEMS/NEMS
Thursday 8:00am PS1+TF-ThM Plasma Deposition and Plasma Assisted ALD
Thursday 8:00am PS2+TF-ThM Atomic Layer Etching (ALE) and Low-Damage Processing
Thursday 8:00am MS+PS+TF-ThM Processes for Mesoscale Structure on Paper and Textiles 
Thursday 8:00am SM+AS+BI+PS-ThM Plasma Processing of Antimicrobial Materials and Devices
Thursday 8:00am TF+PS-ThM Advanced CVD and Chemical Vapor Infiltration Methods
Thursday 2:20pm PS+SE-ThA Atmospheric Pressure Plasma Processing; Fundamental and Applications
Thursday 2:20pm PS-ThA Plasma Processing of Nanoparticles and Nanomaterials
Thursday 2:20pm MS+PS+TF-ThA Functionalization  of Paper and Textiles & Their Applications
Thursday 2:20pm SM+AS+BI+PS-ThA Plasma Processing of Biomemetic Materials
Friday 8:20am PS1-FrM Plasma Sources
Friday 8:20am PS2-FrM Plasma Surface Interactions II

AVS 61st International Symposium & Exhibition