| AVS 61st International Symposium & Exhibition | |
| Thin Film | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | TF+PS-MoM1 Invited Paper Barrier Properties of Plastic Films Coated with Al2O3 by Roll-to-Roll ALD Charles Dezelah, Picosun USA, LLC, T. Hirvikorpi, R. Laine, W.-M. Li, Picosun Oy, Finland, M. Vähä-Nissi, E. Salo, VTT Technical Research Centre of Finland, V. Kilpi, S. Lindfors, Picosun Oy, Finland, J. Vartiainen, E. Kenttä, J. Nikkola, A. Harlin, VTT Technical Research Centre of Finland, J. Kostamo, Picosun Oy, Finland |
| 9:00am | TF+PS-MoM3 An Industrial Approach to Roll-to-Roll Atomic Layer Deposition M.J. Söderlund, P.T. Soininen, Ville Malinin, Beneq, Finland |
| 9:20am | TF+PS-MoM4 Modular Rotating Cylinder Design for Spatial ALD on Porous Flexible Substrates Kashish Sharma, R.B. Hall, S.M. George, University of Colorado at Boulder |
| 9:40am | TF+PS-MoM5 Invited Paper Spatial Atmospheric Atomic Layer Deposition of Oxide and Oxysulfide Semiconductors Andrea Illiberi, TNO, Netherlands |
| 10:40am | TF+PS-MoM8 Large Area Atmospheric Spatial Atomic Layer Deposition of Zn(O,S) Buffer Layers for CIGS Solar Cells on Glass Substrates M.D. Bijker, R.S.R. Archer, Smit Ovens B.V., Netherlands, P. Poodt, Holst Centre / TNO, Netherlands, A. Illiberi, Solliance / TNO, Netherlands, Karel Spee, Smit Ovens B.V., Netherlands |
| 11:00am | TF+PS-MoM9 Growth Rates and Mechanisms for Al2O3 ALD using TMA/ O3 at Atmospheric Pressure MoatazBellah Mousa, C.J. Oldham, G.N. Parsons, North Carolina State University |
| 11:20am | TF+PS-MoM10 Integration of Feature and Reactor Scales during the Simulation of ALD Scale Up Angel Yanguas-Gil, J.A. Libera, J.W. Elam, Argonne National Laboratory |