AVS 66th International Symposium & Exhibition
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Monday 1:40pm | TF+2D+AP+EL+SS-MoA | ALD and CVD: Nucleation, Surface Reactions, Mechanisms, and Kinetics |
| Tuesday 2:20pm | AP+EL+MS+PS+SS+TF-TuA | Advancing Metrology and Characterization to enable Atomic Layer Processing |
| Wednesday 8:00am | EL+AS+EM+TF-WeM | Optical Characterization of Thin Films and Nanostructures |
| Wednesday 2:20pm | EL+EM-WeA | Spectroscopic Ellipsometry: Novel Applications and Theoretical Approaches |
| Thursday 2:20pm | EL-ThA | Spectroscopic Ellipsometry Late News Session |
| Thursday 2:20pm | TF+AS+EL+PS+RA-ThA | Characterization of Thin Film Processes and Properties |
| Thursday 6:30pm | EL-ThP | Spectroscopic Ellipsometry Focus Topic Poster Session |