AVS 60th International Symposium and Exhibition

  Click here to Download program book for this Topic  
  in Adobe Acrobat format  

Plasma Science and Technology Sessions

Click a session title to see the papers


Start Time Session Code Session Title
Monday 8:20am PS+AS+BI+SE-MoM Atmospheric Plasma Processing: Fundamental and Applications
Monday 8:20am PS-MoM Innovative Chemistries for Advanced Etch Processes
Monday 8:20am EN+PS+TF-MoM Thin Film, Organic, and Chalcogenide Solar Cells
Monday 8:20am GR+EM+NS+PS+SS+TF-MoM Growth of 2D Materials
Monday 2:00pm PS+TF-MoA Plasma Deposition
Monday 2:00pm PS-MoA Advanced BEOL/Interconnect Etching
Monday 2:00pm MS+AS+EM+NS+PS+TF-MoA IPF 2013-Manufacturing Challenges for Emerging Technologies: III. Manufacturing Challenges: Electronics
Tuesday 8:00am PS1-TuM Plasma Sources
Tuesday 8:00am PS2-TuM Advanced FEOL/Gate Etching
Tuesday 8:00am EM+PS-TuM High-k Oxides for MOSFETs and Memory Devices I
Tuesday 8:00am MS+AS+BA+BI+PS+TF-TuM IPF 2013-Manufacturing Challenges for Emerging Technologies: IV. Manufacturing Challenges: The Life Sciences
Tuesday 2:00pm PS1-TuA Plasma Diagnostics, Sensors and Control
Tuesday 2:00pm PS2-TuA Deep Etch Processes for Vias, Trenches and MEMS
Tuesday 2:00pm EN+AS+PS-TuA Water Splitting and Carbon Dioxide Conversion
Tuesday 2:00pm MS+AS+EL+EM+PS+TF-TuA Manufacturing Challenges of Nanoscale Patterning
Tuesday 6:00pm PS-TuP Plasma Science and Technology Poster Session
Wednesday 8:00am PS-WeM Fundamentals of Plasma Surface Interactions
Wednesday 8:00am EM+PS-WeM Oxides and Dielectrics for Novel Devices and Ultra-dense Memory II
Wednesday 2:00pm PS-WeA PSTD at AVS60: Looking Back and Moving Forward
Wednesday 2:00pm SE+PS-WeA Atmospheric Pressure Plasmas
Thursday 8:00am PS+AS+NS+SS-ThM Plasma Synthesis of Nanostructures
Thursday 8:00am PS-ThM Plasma Modeling
Thursday 8:00am EL+AS+EN+PS+SS+TF-ThM Spectroscopic Ellipsometry for Photovoltaics and Instrument Development
Thursday 8:00am EM+AS+PS+TF-ThM Materials and Process for Advanced Interconnects I
Thursday 8:00am SE+PS-ThM Pulsed Plasmas in Surface Engineering (8:00-10:00 am)/Atmospheric Pressure Plasmas (10:40 am-12:00 pm)
Thursday 8:00am TF+PS-ThM Advanced CVD Methods
Thursday 2:00pm PS-ThA Low Damage Processing
Thursday 2:00pm GR+AS+BI+PS+SS-ThA Plasma Processing, Surface Chemistry, Functionalization, and Sensor Applications of 2D Materials

AVS 60th International Symposium and Exhibition