AVS 60th International Symposium and Exhibition
    Electronic Materials and Processing Tuesday Sessions

Session EM+PS-TuM
High-k Oxides for MOSFETs and Memory Devices I

Tuesday, October 29, 2013, 8:00 am, Room 101 B
Moderator: A.C. Kummel, University of California San Diego


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  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:00am EM+PS-TuM1
Calibration of Capacitance Force Microscopy using Micro-scale Gold Dots
K. Sardashti, A.C. Kummel, University of California San Diego
8:20am EM+PS-TuM2
RF-PVD Si Capping for CET Decrease in High-h/Metal Gate 14nm FDSOI
C. Suarez Segovia, P. Caubet, STMicroelectronics, France, C. Leroux, CEA-LETI, France, M. Juhel, S. Zoll, O. Weber, STMicroelectronics, France, G. Ghibaudo, IMEP-LAHC, France
8:40am EM+PS-TuM3 Invited Paper
Growth of Oxides for Negative Capacitance Gate Dielectrics
R. Droopad, Texas State University
9:20am EM+PS-TuM5 Invited Paper
Switching Aspects of RRAM – First Principles and Model Simulations Insight
S. Clima, R. Degraeve, K. Sankaran, Y.Y. Chen, A. Fantini, A. Belmonte, L. Zhang, N. Raghavan, L. Goux, B. Govoreanu, D.J. Wouters, M. Jurczak, G. Pourtois, IMEC, Belgium
10:40am EM+PS-TuM9
Comparison of Surface Defects on Cleaved GaAs(110) and MBE Grown InGaAs(110)
M. Edmonds, T. Kent, University of California San Diego, R. Droopad, Texas State University, A.C. Kummel, University of California San Diego
11:00am EM+PS-TuM10
Scalability of Doped Cubic HfO2 Films
C. Adelmann, K. Opsomer, Imec, Belgium, S. Brizzi, M. Tallarida, D. Schmeisser, BTU Cottbus, Germany, T. Schram, S.A. Chew, N. Horiguchi, S. Van Elshocht, L.-A. Ragnarsson, Imec, Belgium
11:20am EM+PS-TuM11 Invited Paper
Advance of 3D-stackable Binary-oxide ReRAM for Storage-class Memory Applications
T.H. Hou, C.W. Hsu, I.T. Wang, National Chiao Tung University, Taiwan, Republic of China