| AVS 60th International Symposium and Exhibition | |
| Plasma Science and Technology | Wednesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:00am | PS-WeM1 Examination of Atomistic Etching Control of SiO2-Si-SiO2 Multi-Layers Stacks Using Cyclic Ar/C4F8 Plasma D. Metzler, G.S. Oehrlein, University of Maryland, College Park, S.U. Engelmann, R.L. Bruce, E.A. Joseph, IBM T.J. Watson Research Center |
| 8:20am | PS-WeM2 Plasma Induced Surface Roughness of ArF Photoresist Examined by Plasma-Beam Processes T. Takeuchi, Y. Zhang, K. Ishikawa, M. Sekine, Nagoya University, Japan, Y. Setsuhara, Osaka University, Japan, K. Takeda, H. Kondo, M. Hori, Nagoya University, Japan |
| 8:40am | PS-WeM3 Sidewall Polymer Deposition for Achieving Near 1:1 x:y Critical Dimension Shrinkage N.A. Fox-Lyon, D. Metzler, A.J. Knoll, University of Maryland, College Park, T. Lii, D. Farber, Texas Instruments, G.S. Oehrlein, University of Maryland, College Park |
| 9:00am | PS-WeM4 Plasma Energy Partitioning and Influences on Surface Reactivity J.M. Blechle, M.F. Cuddy, E.R. Fisher, Colorado State University |
| 9:20am | PS-WeM5 H2/ D2/Ar Plasmas Interacting with Carbon-based Films: Plasma Distribution Functions, Etching and Applications N.A. Fox-Lyon, A.J. Knoll, University of Maryland, College Park, J. Franek, West Virginia University, V. Demidov, Wright-Patterson Air Force Base, M. Koepke, West Virginia University, G.S. Oehrlein, University of Maryland, College Park |
| 9:40am | PS-WeM6 Molecular Dynamics Simulation for Hydrogen Plasma Processing of Graphene A. Davydova, E. Despiau-Pujo, G. Cunge, Cnrs/ujf/ Cea - Ltm, France, D.B. Graves, University of California, Berkeley, L. Magaud, L. Delfour, CNRS/UJF, Institut Néel, France |
| 10:40am | PS-WeM9 Invited Paper Beam Studies of Plasma Etching Reactions K. Karahashi, S. Hamaguchi, Osaka University, Japan |
| 11:20am | PS-WeM11 Surface Cleaning for Enhanced Adhesion to Packaging Surfaces: Plasma and Free Radical Chemistries S. Gaddam, H. Kasi, J. Kelber, University of North Texas |