AVS 51st International Symposium
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Tuesday 1:20pm | PS+MS-TuA | 45nm Node with Panel Discussion |
| Tuesday 4:00pm | MS-TuP | Poster Session |
| Wednesday 8:20am | MS-WeM | Semiconductor Manufacturing Technologies for the 45nm Crisis |
| Wednesday 8:20am | AS-WeM | Chemometric Analysis of Spectral or Image Data; XPS/TOF-SIMS Applications |
| Wednesday 2:00pm | MS+AS-WeA | Non-Destructive Analysis and Metrology for Advanced Manufacturing |
| Thursday 8:20am | MS-ThM | Advanced Process Control |