AVS 51st International Symposium
Click a session title to see the papers
| Start Time | Session Code | Session Title |
|---|---|---|
| Monday 8:20am | MN-MoM | Processing and Characterization for MEMS and NEMS |
| Monday 8:20am | PS1-MoM | Low-k Dielectric Etching |
| Monday 2:00pm | MN-MoA | Micro and Nano Fabrication Techniques for MEMS and NEMS |
| Monday 5:00pm | MN-MoP | Poster Session |
| Tuesday 8:20am | MN-TuM | MEMS and NEMS: Enabling Tools for Scientific Research |
| Tuesday 1:20pm | MN+MS+PS+TF-TuA | Nano/MEMS Manufacturing and Plasmas |
| Friday 8:20am | BI+MN-FrM | Bio-MEMS and Microfluidics |