| AVS 51st International Symposium | |
| MEMS and NEMS | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MN-MoM1 Invited Paper Porous Thin Films for MEMS and Nano Applications C.J. Kim, University of California, Los Angeles |
| 9:00am | MN-MoM3 Nanotribological Characterization of Perfluoropolymer Thin Films for BioMEMS Applications K. Lee, B. Bhushan, D. Hansford, The Ohio State University |
| 9:20am | MN-MoM4 Multi-scale Friction Experiments Using Atomic Force Microscopy and Surface Micromachined Interfaces E.E. Flater, M.D. Street, University of Wisconsin-Madison, A.D. Corwin, M.P. de Boer, Sandia National Laboratories, R.W. Carpick, University of Wisconsin-Madison |
| 9:40am | MN-MoM5 Deposition and Characterization of Nitrogen-Doped Polycrystalline SiC Films for MEMS Applications J. Trevino, X.-A. Fu, S. Rajgopal, M. Mehregany, C.A. Zorman, Case Western Reserve University |
| 10:00am | MN-MoM6 Characterization of Nanotribological Properties and Surface Chemistry of Advanced Nanostructured Carbon Materials for MEMS and NEMS Applications A.V. Sumant, D.S. Grierson, University of Wisconsin-Madison, J.E. Gerbi, J.P. Birrell, J.A. Carlisle, O.H. Auciello, Argonne National Laboratory, T. Friedmann, J.P. Sullivan, Sandia National Laboratories, R.W. Carpick, University of Wisconsin-Madison |
| 10:40am | MN-MoM8 Critical Issues in Epitaxial Growth of Pulse Laser Deposited AlN Films for MEMS and NEMS based RF Resonators S. Hullavarad, R. Vispute, T. Venkatesan, University of Maryland, A. Wickenden, L. Currano, M. Dubey, T. Takacs, J. Pulskamp, U.S. Army Research Laboratory |
| 11:00am | MN-MoM9 Vapor Phase Uptake of Mobile Organophosphates for MEMS Lubrication Purposes D.A. Hook, W. Neeyakorn, C. Jaye, J. Krim, North Carolina State University |
| 11:20am | MN-MoM10 Mechanical and Electrochemical Characterization of Gold Membranes on a Drug Delivery MEMS Device Y. Li, M.J. Cima, Massachusetts Institute of Technology |
| 11:40am | MN-MoM11 Microfabrication and Nanomechanical Characterization of Polymer MEMS for Biological Applications G. Wei, B. Bhushan, N. Ferrell, D. Hansford, The Ohio State University |