| AVS 51st International Symposium | |
| MEMS and NEMS | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 2:00pm | MN-MoA1 Invited Paper Parylene and Its MEMS Applications Y.-C. Tai, California Institute of Technology |
| 2:40pm | MN-MoA3 Fabrication of Ferroelectric Nanomechanical Resonators K. Son, T. George, Jet Propulsion Laboratory, R.W. Fathauer, S. Bhaskar, W. Cao, S. Dey, L. Wang, S.M. Phillips, Arizona State University, B. Lambert, D.P. Weitekamp, California Institute of Technology, B.H. Houston, J.F. Vignola, J.E. Butler, Naval Research Laboratory, J. Yang, M.A. Khan, University of South Carolina |
| 3:00pm | MN-MoA4 BCB-Based Linear Micromotor Supported on Microball Bearings: Design Concepts, Characterization, and Fabrication Development A. Modafe, N. Ghalichechian, R. Ghodssi, University of Maryland, College Park |
| 3:20pm | MN-MoA5 Dielectrophoretic Assembly and Integration of Functional Nanodevices with VLSI Circuitry S. Evoy, Y. Dan, The University of Pennsylvania, A. Narayanan, S. Raman, Virginia Tech |
| 3:40pm | MN-MoA6 Invited Paper Nanoscale Synthesis of Particles and Vesicles in Microfluidic Devices A.P. Lee, University of California at Irvine |
| 4:20pm | MN-MoA8 Layered Nanofabrication (lnf) As a Tool for NEMS and Bio-NEMS B.E. Koel, A.A.G. Requicha, M.E. Thompson, University of Southern California |
| 4:40pm | MN-MoA9 Ultrafast Fabrication of 3D Microstructures for MEMS Applications H. Yu, B. Li, X. Zhang, Boston University |
| 5:00pm | MN-MoA10 Micro-fabricated Charge-sensing Resistive Probe H. Park, J. Jung, D.-K. Min, C. Park, K. Baeck, S. Kim, H. Ko, S. Hong, Samsung Advanced Institute of Technology, Korea |