| AVS 51st International Symposium | |
| MEMS and NEMS | Monday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| MN-MoP1 Fabrication of PLT Thin Film Waveguides by Low Temperature Two-Step Pulsed Laser Deposition Processes J.-S. Kao, D.-R. Liu, C.-H. Tsai, National Science Council, Taiwan, I.-N. Lin, Tamkang University, Taiwan |
| MN-MoP2 Three-Terminal Nano-Manipulator Fabrication by Focused-Ion-Beam Chemical-Vapor-Deposition M. Kawamori, R. Kometani, S. Matsui, University of Hyogo, CREST-JST, Japan |
| MN-MoP3 Enhancement of Piezoelectric Properties of Silver Doped Pb(Zr,Ti)O@sub3@-Pb(Mn,Wn,Sb,Nb)O@sub3@ Thin Films H.W. Chung, S.H. Lim, E.S. Lee, S.Y. Lee, Yonsei University, Korea |
| MN-MoP4 Electron Transport in Nanomechanical Devices P. Datskos, N.V. Lavrik, Oak Ridge National Laboratory |
| MN-MoP5 Deep Quartz and Silicon Etching in Newly Proposed ICCP Plasma Y. Morikawa, T. Koidesawa, T. Hayashi, K. Suu, M. Ishikawa, ULVAC, Inc., Japan |
| MN-MoP6 Wafer Scale Replication of a Micro-well Array Assay Chip M.W. Lee, S.-B. Jo, K.-C. Lee, K.J. Lim, Inha University, South Korea, J.K. Suh, LGLS, South Korea, B.-H. O, Inha University, South Korea |
| MN-MoP7 Development of a Disposable Microchip with Capillary Electrophoresis and Integrated Three-Terminal Electrochemical Detection J.H. Kim, M.C. Moon, Y.S. Kim, Myongji University, Korea |
| MN-MoP8 Dissipative Processes in Single-Paddle and Double-Paddle Nanomechanical Silicon Resonators J. Li, S. Evoy, University of Pennsylvania |
| MN-MoP9 Plasma-Free Etch Chemistry to Realize Defect-free GaAs Micromechanical Resonator Structures@footnote 1@ S.W. Kang, S.B. Shim, J.H. Kong, K.R. Char, Y.D. Park, Seoul National University, Korea |
| MN-MoP11 Determination of Young's Modulus for Silicon Membrane in Cryogenic Micropump using Laser Michaelson Interferometry Y. Zhao, B. Li, X. Zhang, Boston University |
| MN-MoP12 Process Integration for Through-Silicon Vias S. Burkett, L. Schaper, Z. Rahman, G. Vangara, S. Spiesshoefer, S. Polamreddy, University of Arkansas |
| MN-MoP13 Processing and Characterization of MEMS Thermal Switches for Emittance Control S.L. Firebaugh, M.A. Beasley, United States Naval Academy, R. Osiander, A.C. Keeney, R.L. Edwards, Johns Hopkins University |