| AVS 51st International Symposium | |
| MEMS and NEMS | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| 8:20am | MN-TuM1 Invited Paper C-MEMS/NEMS: A Novel Technology for Graphite, Ni, and Si Nanoscale Material Formation M. Madou, C. Wang, R. Zaouk, K. Malladi, L. Taherabadi, University of California at Irvine |
| 9:00am | MN-TuM3 Durability Studies of MEMS/NEMS Materials/Coatings at High Sliding Velocities (upto 10 mm/s) Using a Modified AFM N.S. Tambe, B. Bhushan, The Ohio State University |
| 9:20am | MN-TuM4 Chemical Control of Micromechanical Resonators: The Role of Surface Chemistry J.A. Henry, Y. Wang, D. Sengupta, M.A. Hines, Cornell University |
| 9:40am | MN-TuM5 Tribological and Wear Studies of ALD and SILAR Coatings for MEMS Devices C. Nistorica, J.-F. Liu, I. Gory, G.D. Skidmore, Zyvex Corporation, F.M. Mantiziba, B.E. Gnade, University of Texas at Dallas, J. Kim, Kookmin University, Korea |
| 10:00am | MN-TuM6 MEMS-based Force-Detected Nuclear Magnetic Resonance Spectrometer T. George, K. Son, C. Lee, N.V. Myung, E.R. Urgiles, Jet Propulsion Laboratory, L.A. Madsen, G.M. Leskowitz, R.A. Elgammal, D.P. Weitekamp, California Institute of Technology |
| 10:20am | MN-TuM7 Frequency-Tuning for Control of Parametrically-Resonant Mass Sensors W. Zhang, K. Turner, University of California, Santa Barbara |
| 10:40am | MN-TuM8 Field Emission from a Tungsten MEMS Structure D. Cruz, UCLA/Sandia National Laboratories, J.P. Chang, University of California, Los Angeles, M.G. Blain, Sandia National Laboratories |
| 11:00am | MN-TuM9 Suspended Waveguide-Based Tunable Integrated Optical Filters on Indium Phosphide MEMS Platform M. Datta, M.W. Pruessner, D.P. Kelly, R. Ghodssi, University of Maryland, College Park |
| 11:40am | MN-TuM11 Use of Plasma Polymerisation Process for Fabrication of Micro Electromechanical System (MEMS) for Micro-Fluidic Devices M. Dhayal, H.G. Hyung, Dongshin University, South Korea, H.J. Lee, Chonnam National University, South Korea, J.S. Choi, Dongshin University, South Korea |