AVS 49th International Symposium


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Microelectromechanical Systems (MEMS) Sessions

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Start Time Session Code Session Title
Tuesday 8:20am NS+SE+SS+MM-TuM Nanotribology
Tuesday 2:00pm MS+MM-TuA Manufacturing Issues in MEMS and Related Microsystems
Wednesday 8:20am MM+NS-WeM Nanotechnology and Nanofabrication in NEMS
Wednesday 11:00am MM-WeP Poster Session
Wednesday 2:00pm PS+MM-WeA Feature Profile Evolution /Plasma Processing for MEMS
Thursday 8:20am MM+TF-ThM Development and Characterization of MEMS Materials
Thursday 2:00pm MM-ThA Fabrication, Integration, and Packaging Techniques for MEMS
Friday 8:20am AS+MM+BI-FrM BioMEMS and Medical Devices

AVS 49th International Symposium