AVS 49th International Symposium
    Microelectromechanical Systems (MEMS) Wednesday Sessions

Session MM+NS-WeM
Nanotechnology and Nanofabrication in NEMS

Wednesday, November 6, 2002, 8:20 am, Room C-210
Moderator: H.G. Craighead, Cornell University


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

8:20am MM+NS-WeM1 Invited Paper
Probing Nanomechanical Systems with Electron Tunneling Devices
A.N. Cleland, University of California, Santa Barbara
9:00am MM+NS-WeM3
Fabrication and Characterization of a Carbon Nanotube Torsional Oscillator
P.W. Williams, A.M. Patel, S.J. Papadakis, M.R. Falvo, S. Washburn, R. Superfine, University of North Carolina
9:20am MM+NS-WeM4
Femtogram Detection using Nanoelectromechanical Oscillators
B. Ilic, D. Czaplewski, H.G. Craighead, Cornell University, P. Neuzil, Institute of Microelectronics, Singapore
9:40am MM+NS-WeM5
IR Imaging Using Uncooled Nanostructured Microcantilever Thermal Detectors@footnote 1@
P.G. Datskos, Oak Ridge National Laboratory and University of Tennessee, S. Rajic, L.R. Senesac, J. Corbeil, N.V. Lavrik, Oak Ridge National Laboratory
10:00am MM+NS-WeM6
Frequency and Phase Entrainment in MEMS Oscillators
M. Zalalutdinov, K.L. Aubin, A.T. Zehnder, B. Ilic, D. Czaplewski, L. Sekaric, J.M. Parpria, H.G. Craighead, Cornell University
10:20am MM+NS-WeM7
Fabrication of Submicron-Scale Metallic Comb-Drive Actuators
S.W. Park, N.A. Kumar, J.B. Lee, The University of Texas at Dallas
10:40am MM+NS-WeM8
Controlling Energy Losses in Nanoscale Structures with Surface Chemistry
J.A. Henry, Y. Wang, M.A. Hines, Cornell University