AVS 49th International Symposium
    Manufacturing Science and Technology Tuesday Sessions

Session MS+MM-TuA
Manufacturing Issues in MEMS and Related Microsystems

Tuesday, November 5, 2002, 2:00 pm, Room C-109
Moderator: E.G. Seebauer, University of Illinois


  Click here to Download program book for this session  
  in Adobe Acrobat format  

Click a paper to see the details. Presenters are shown in bold type.

2:00pm MS+MM-TuA1 Invited Paper
Silicon Micromachines for Science and Technology
D. Bishop, Bell Laboratories, Lucent Technologies
2:40pm MS+MM-TuA3 Invited Paper
Silicon Nano-biotechnology
G. Timp, University of Illinois, Urbana
3:20pm MS+MM-TuA5 Invited Paper
Manufacturing Issues in MEMS and Related Microsystems
B.P. Gogoi, Motorola
4:00pm MS+MM-TuA7 Invited Paper
MEMS Technology Challenges for Volume Manufacturing
V. Rao, Intel Corporation
4:40pm MS+MM-TuA9 Invited Paper
Manufacturing Issues of Automotive Sensors produced at Bosch
M. Offenberg, Robert Bosch GmbH, Germany