| AVS 53rd International Symposium | |
| Vacuum Technology | Tuesday Sessions |
Click a paper to see the details. Presenters are shown in bold type.
| VT-TuP1 Vacuum Pump Oil Testing to Minimize Oil Waste at the National Synchrotron Light Source* C.L. Foerster, E.-P. Hu, E. Haas, Brookhaven National Laboratory |
| VT-TuP2 A Diagnostic Technique for Particulate Deposits in the Pipes within the CVD System J.Y. Yun, Korea Research Institute of Standards and Science, J.H. Lee, D.K. Moon, Konkuk University, Korea, S.W. Kang, D.-J. Seong, Y.H. Shin, Korea Research Institute of Standards and Science |
| VT-TuP3 Friction Properties of Aluminum Film Prepared with Anodic Oxidation A. Kasahara, M. Goto, M. Tosa, National Institute for Materials Science, Japan |
| VT-TuP4 Specification Study of the Two Different Types Quadrupole Mass Spectrometer in Different Configurations and Operating Parameters S.S. Hong, Korea Research Institute of Standards and Science (KRISS), I. Tanvir, Pakistan Vacuum Society, S.W. Kang, Y.H. Shin, Korea Research Institute of Standards and Science (KRISS) |
| VT-TuP6 A Two-Stage Flow Divider System for the Test and Calibration of Vacuum Gauges H. Yoshida, K. Arai, H. Akimichi, M. Hirata, AIST, Japan |
| VT-TuP7 ROR(t) Method in Vacuum Diagnostic J. Zhou, H. Gao, D. Paul, Applied Materials Inc. |
| VT-TuP8 Viscosity Measurement of Ozone-oxygen Gas Mixture with a Quartz-Friction Sensor A. Kurokawa, Y. Kobayashi, AIST, Japan |
| VT-TuP9 Comparisons of Vacuum Standards Among NMIJ, NIST, IMGC and KRISS in Medium Vacuum H. Akimichi, M. Hirata, NMIJ AIST, Japan, P.J. Abbott, National Institute of Standards and Technology, M. Bergoglio, A. Calcatelli, IMGC, Italy, S.S. Hong, KRISS, Korea |
| VT-TuP10 Influences of Handling Procedures on the Accommodation Coefficient of a Spinning Rotor Gauge M. Hirata, E. Komatsu, H. Akimichi, NMIJ AIST, Japan |
| VT-TuP11 Measurement of the Photon Stimulated Desorption for the Aluminum Chambers with Ti-Zr-V NEG-coating G.Y. Hsiung, C.Y. Yang, C.M. Cheng, C.L. Chen, C.K. Chan, NSRRC, Taiwan, J.R. Chen, NSRRC and NTHU, Taiwan |
| VT-TuP12 Viscosity of Hydrogen-Methane Mixed Gas Y. Kobayashi, A. Kurokawa, National Institute of Advanced Industrial Science and Technology, Japan, M. Hirata, Shibaura Institute of Technology, Japan |
| VT-TuP13 Outgassing Rates of Stainless Steel Pipes Treated with 400°C Air Bake X. Liu, K.W. Smolenski, Y. Li, C.K. Sinclair, Cornell University |
| VT-TuP14 The Small Quadrupole Mass Spectrometer for the Pressure Range Over 0.1Pa Y. Matsumoto, K. Yamamuro, N. Takahashi, N. Mizutani, T. Nakajima, ULVAC Inc. Japan |
| VT-TuP15 New Sublimation Reactor for Epitaxial Growth of II-VI Films L.J. Rascon, L.C. Romo, S. Rogers, S. Quinones, J. McClure, D. Zubia, University of Texas at El Paso |
| VT-TuP16 A Study of New-Type System for Vacuum Gauges Calibration Y.-W. Lin, C.-P. Lin, C.N. Hsiao, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan |
| VT-TuP17 Design of the EBIS Vacuum System M. Mapes, E. Beebe, A. Pikin, J. Alessi, J. Ritter, L. Smart, Brookhaven National Lab |
| VT-TuP18 Vacuum System of ISAC RFQ at TRIUMF I. Sekachev, D. Yosifov, TRIUMF, Canadian National Laboratory |