AVS 53rd International Symposium | |
Vacuum Technology | Tuesday Sessions |
Session VT-TuP |
Session: | Vacuum Technology Poster Session |
Presenter: | Y. Kobayashi, National Institute of Advanced Industrial Science and Technology, Japan |
Authors: | Y. Kobayashi, National Institute of Advanced Industrial Science and Technology, Japan A. Kurokawa, National Institute of Advanced Industrial Science and Technology, Japan M. Hirata, Shibaura Institute of Technology, Japan |
Correspondent: | Click to Email |