| AVS 53rd International Symposium | |
| Vacuum Technology | Tuesday Sessions |
| Session VT-TuP |
| Session: | Vacuum Technology Poster Session |
| Presenter: | Y. Kobayashi, National Institute of Advanced Industrial Science and Technology, Japan |
| Authors: | Y. Kobayashi, National Institute of Advanced Industrial Science and Technology, Japan A. Kurokawa, National Institute of Advanced Industrial Science and Technology, Japan M. Hirata, Shibaura Institute of Technology, Japan |
| Correspondent: | Click to Email |