AVS 53rd International Symposium
    Vacuum Technology Tuesday Sessions
       Session VT-TuP

Paper VT-TuP16
A Study of New-Type System for Vacuum Gauges Calibration

Tuesday, November 14, 2006, 6:00 pm, Room 3rd Floor Lobby

Session: Vacuum Technology Poster Session
Presenter: Y.-W. Lin, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan
Authors: Y.-W. Lin, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan
C.-P. Lin, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan
C.N. Hsiao, Instrument Technology Research Center, National Applied Research Laboratories, Taiwan
Correspondent: Click to Email
The purpose of this article is to analyse the stability of new-type system for vacuum gauges calibration. Design and operating procedures of the system mainly uses direct comparative method to calibrate vacuum gauges ranging from 10@super 3@ to 10@super -6@ Torr. The review of system is depended on capacitance gauge, ionization gauge and spinning rotor viscosity gauge, and estimated uncertainty is calculated with different pressure. Observational data show that chamber evacuates down to 10@super -8@ torr, the uncertainty of system varies from 0.6% at the high vacuum, to 1*10@super -5@ Torr at midrange, and 1*10@super -2@ Torr at the rough vacuum. From these pieces of result, the system can effectively use for calibration of vacuum gauges besides ultra-high vacuum.