| AVS 53rd International Symposium | |
| Vacuum Technology | Tuesday Sessions |
| Session VT-TuP |
| Session: | Vacuum Technology Poster Session |
| Presenter: | M. Hirata, NMIJ AIST, Japan |
| Authors: | M. Hirata, NMIJ AIST, Japan E. Komatsu, NMIJ AIST, Japan H. Akimichi, NMIJ AIST, Japan |
| Correspondent: | Click to Email |