AVS 53rd International Symposium
    Vacuum Technology Tuesday Sessions
       Session VT-TuP

Paper VT-TuP4
Specification Study of the Two Different Types Quadrupole Mass Spectrometer in Different Configurations and Operating Parameters

Tuesday, November 14, 2006, 6:00 pm, Room 3rd Floor Lobby

Session: Vacuum Technology Poster Session
Presenter: S.S. Hong, Korea Research Institute of Standards and Science (KRISS)
Authors: S.S. Hong, Korea Research Institute of Standards and Science (KRISS)
I. Tanvir, Pakistan Vacuum Society
S.W. Kang, Korea Research Institute of Standards and Science (KRISS)
Y.H. Shin, Korea Research Institute of Standards and Science (KRISS)
Correspondent: Click to Email
Quadrupole mass spectrometers (QMS) are used in many vacuum systems for leak checking and general monitoring of backgroung gases. The QMS performs mainly three functions: it ionizes a gas, it seperates the resulting molecular ions as a function of the mass-to-charge ratios and it detects the ions.@footnote 1@ Partial pressures as measurement of concentration of individual molecule species have been increasing interest in many semiconductor and display manufacturing applications. The Korean Research Institute of Standard and Science (KRISS) has newly developed a QMS calibration system for the investigation of all the QMSs performances. It consist of a vacuum chamber which is divided by orifice conductance, ultra-high pumping system, vacuum gauging instruments, and gas mixture chambers. And the system is also equipped with bake-out heater. Extractor ionization gauges and spinning rotor gauges have been used as accurate total pressure measurements. QMS sensitivity is the measurement response as a ratio of the change in spectrum peak height to corresponding change in total pressure due the change in partial pressure of a particular species. We will present the sensitivities dependences of the different types of two QMSs according to the operating parameter such as ion source, ion energy and ion detector. We will also present the ion current in combination some ionization energies to investigate behaviors of the either instrument's configuration, peak resolution and peak maximum behaviours, the response of number of cycle and etc. @FootnoteText@@footnote 1@D. J. Mitchell, 0J. Vac. Sci. Technol. A 3 (3) May/June, 527 (1993).