AVS 53rd International Symposium
    Vacuum Technology Tuesday Sessions
       Session VT-TuP

Paper VT-TuP3
Friction Properties of Aluminum Film Prepared with Anodic Oxidation

Tuesday, November 14, 2006, 6:00 pm, Room 3rd Floor Lobby

Session: Vacuum Technology Poster Session
Presenter: A. Kasahara, National Institute for Materials Science, Japan
Authors: A. Kasahara, National Institute for Materials Science, Japan
M. Goto, National Institute for Materials Science, Japan
M. Tosa, National Institute for Materials Science, Japan
Correspondent: Click to Email
Traditional anodic oxidation processing has attracted attention again in recent years because of its nano-scale porous structure preparation. We found that type 304 austenitic stainless steel materials with a surface roughness (Rz) around 100nm can offer as smooth sliding in a vacuum as at an atmospheric pressure, and we have also studied relation between direction of sliding probe and generated friction force. We report a friction measurement of anodized aluminum films in a vacuum (5E-6Pa) with nano-scale surface roughness. The anodized aluminum films with a surface roughness (Rz) of 103-450nm were classified into two groups. One group of aluminum films with a surface roughness of Rz=150-250nm shows the same friction coefficient (0.35) both in an atmosphere and a vacuum, and the other group for alumina included those with Rz=103nm and Rz=260nm or larger show a smaller friction coefficient(0.22-0.3) in a vacuum than in an atmosphere(0.35-0.45). The reason why the first group showed no difference in the friction coefficient between in an atmosphere and in a vacuum might be a suppression of desorption in the adsorption layers acting as lubrication. The reason why the other group showed a smaller friction coefficient in a vacuum than in an atmosphere might be more desorption of the adsorption layer. We will show a detailed discussion on the effect of adsorption layer of anodized aluminum film and surface nano-structure on friction in a vacuum.